Patent: 6,307,731
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Summary for Patent: 6,307,731
| Title: | Dielectric capacitor and memory and method of manufacturing the same |
| Abstract: | Provided are a dielectric capacitor, in which micorfabrication is easily performed, a memory and a method of manufacturing the dielectric capacitor and the memory. A bottom electrode, a dielectric film and a top electrode are sequentially provided on a substrate portion. The bottom electrode comprises an adhesive layer including IrHf, a precious metal layer including Ir, an oxygen inclusion layer including IrHfO and, a precious metal layer including Ir in sequence on the substrate portion. The top electrode comprises, a precious metal layer including Ir and an oxygen inclusion layer including IrHfO in sequence on the dielectric film. Since platinum is not used for the top electrode and the bottom electrode, microfabrication thereof is facilitated Further, the top electrode is deposited before crystallizing or crystal growing the dielectric film, and thereby the top electrode and the bottom electrode can be processed by etching. As a result, etching can be performed on its smooth surface, allowing easier microfabrication. |
| Inventor(s): | Katori; Kenji (Kanagawa, JP) |
| Assignee: | Sony Corporation (Tokyo, JP) |
| Application Number: | 09/584,140 |
| Patent Claims: | see list of patent claims |
Details for Patent 6,307,731
| Applicant | Tradename | Biologic Ingredient | Dosage Form | BLA | Approval Date | Patent No. | Expiredate |
|---|---|---|---|---|---|---|---|
| Pharmalucence Inc | MICROLITE | radiolabeled albumin technetium tc-99m albumin colloid kit | 018263 | 03/25/1983 | ⤷ Try a Trial | 2019-06-02 | |
| >Applicant | >Tradename | >Biologic Ingredient | >Dosage Form | >BLA | >Approval Date | >Patent No. | >Expiredate |
