Generated: December 15, 2017
DrugPatentWatch Database Preview
Details for Patent: 4,833,790
« Back to Dashboard
Summary for Patent: 4,833,790
|Title:|| Method and system for locating and positioning circular workpieces|
|Abstract:||A system for locating and positioning wafers includes a wafer shuttle, a spindle, and a position sensor. The wafer shuttle retrieves wafers from a storage location, typically a wafer cassette, and transports the wafers to the spindle. The wafers are then incrementally rotated on the spindle, and the distance between the center of rotation and the periphery of the wafer along a linear path is measured. By using three such measurements, the distance and angle with which the center of the wafer is offset from the center of rotation may be calculated. The wafer can then be centered on the spindle by rotation and translated a proper distance by the wafer shuttle. Usually, the wafers will be further rotationally oriented so that the crystal lattice lies in a desired direction.|
|Inventor(s):|| Spencer; Robert M. (San Juan Capistrano, CA), Lada; Christopher O. (Palo Alto, CA) |
|Assignee:|| Lam Research (Fremont, CA) |
Patent Claim Types:|
see list of patent claims
No matches for this query
Serving leading biopharmaceutical companies globally:
Drugs may be covered by multiple patents or regulatory protections. All trademarks and applicant names are the property of their respective owners or licensors.
Although great care is taken in the proper and correct provision of this service, thinkBiotech LLC does not accept any responsibility for possible consequences of errors or omissions in the provided data.
The data presented herein is for information purposes only. There is no warranty that the data contained herein is error free.
thinkBiotech performs no independent verifification of facts as provided by public sources nor are attempts made to provide legal or investing advice. Any reliance on data provided herein is done solely at the discretion of the user.
Users of this service are advised to seek professional advice and independent confirmation before considering acting on any of the provided information. thinkBiotech LLC reserves the right to amend, extend or withdraw any part or all of the offered service without notice.