Upgrade to enjoy subscriber-only features like email alerts and data export. See the Plans and Pricing
|Title:||Method of forming a contact plug in a semiconductor device|
|Abstract:||A contact plug is formed in a semiconductor device having a silicon substrate having a gate electrode, a junction area and an insulating interlayer. A contact hole is formed to expose the junction area. A plasma process is carried out with respect to a resultant substrate, thereby removing natural oxides created on an exposed surface of the junction area. A first silicon layer is deposited on the contact hole and on the insulating interlayer. A heat-treatment process is carried out with respect to the first silicon layer so as to grow the amorphous silicon into the epitaxial silicon. A second silicon layer is deposited on the first silicon layer.|
|Inventor(s):||Park; Sung Eon (Seoul, KR)|
|Assignee:||Hynix Semiconductor Inc. (Kyoungki-do, KR)|
Patent Claim Types:|
see list of patent claims
|Use; Process; Device;|
Back Citations: 2nd percentile
Forward Citations: 3rd percentile
|Patent Number||Expiration Date|
|7,049,230||May 23, 2014|
|Country||Document Number||Estimated Expiration||Supplementary Protection Certificate||SPC Country||SPC Expiration|
|South Korea||100668821||► subscribe|
|South Korea||20050050713||► subscribe|
|South Korea||100650715||► subscribe|
| This preview shows a limited data set|
Subscribe for full access, or try a Trial
The estimated expiration dates shown above are derived by simply adding 20 years to the priority date.
Due to the complexity of determining patent expirations even in a single country, compounded by the diversity of global patent laws, it is advisable to have patent counsel verify freedom to operate.
Export unavailable in trial.
Subscribe for complete access.
Drugs may be covered by multiple patents or regulatory protections. All trademarks and applicant names are the property of their respective owners or licensors. Although great care is taken in the proper and correct provision of this service, thinkBiotech LLC does not accept any responsibility for possible consequences of errors or omissions in the provided data. The data presented herein is for information purposes only. There is no warranty that the data contained herein is error free. thinkBiotech performs no independent verifification of facts as provided by public sources nor are attempts made to provide legal or investing advice. Any reliance on data provided herein is done solely at the discretion of the user. Users of this service are advised to seek professional advice and independent confirmation before considering acting on any of the provided information. thinkBiotech LLC reserves the right to amend, extend or withdraw any part or all of the offered service without notice.