.

Deeper Knowledge, Faster

  • Identify first generic entrants
  • Uncover prior art in expired and abandoned patents
  • Drug patents in 130+ countries

► See Plans & Pricing

Upgrade to enjoy subscriber-only features like email alerts and data export. See the Plans and Pricing

Serving 500+ biopharmaceutical companies globally:

Baxter
Citi
Chubb
Chinese Patent Office
Moodys
Novartis
Cantor Fitzgerald
Fish and Richardson
Colorcon
UBS

Generated: September 22, 2017

DrugPatentWatch Database Preview

Details for Patent: ► Subscribe

« Back to Dashboard

Summary for Patent: ► Subscribe

Title:Method of forming a contact plug in a semiconductor device
Abstract: A contact plug is formed in a semiconductor device having a silicon substrate having a gate electrode, a junction area and an insulating interlayer. A contact hole is formed to expose the junction area. A plasma process is carried out with respect to a resultant substrate, thereby removing natural oxides created on an exposed surface of the junction area. A first silicon layer is deposited on the contact hole and on the insulating interlayer. A heat-treatment process is carried out with respect to the first silicon layer so as to grow the amorphous silicon into the epitaxial silicon. A second silicon layer is deposited on the first silicon layer.
Inventor(s): Park; Sung Eon (Seoul, KR)
Assignee: Hynix Semiconductor Inc. (Kyoungki-do, KR)
Application Number:10/984,494
Patent Claim Types:
see list of patent claims
Use; Process; Device;

No matches for this query

Foreign Priority and PCT Information for Patent: ► Subscribe

Foriegn Application Priority Data
Foreign Country Foreign Patent Number Foreign Patent Date
South Korea10-2003-0084311Nov 26, 2003
South Korea10-2003-0084313Nov 26, 2003

International Patent Family for Patent: ► Subscribe

Country Document Number Estimated Expiration Supplementary Protection Certificate SPC Country SPC Expiration
South Korea20050050713► Subscribe
South Korea100650715► Subscribe
South Korea20050050711► Subscribe
South Korea100668821► Subscribe
This preview shows a limited data set
Subscribe for full access, or try a Trial

The estimated expiration dates shown above are derived by simply adding 20 years to the priority date.
Due to the complexity of determining patent expirations even in a single country, compounded by the diversity of global patent laws, it is advisable to have patent counsel verify freedom to operate.

Export unavailable in trial.
Subscribe for complete access.

For more information try a trial or see the database preview and plans and pricing

Serving 500+ biopharmaceutical companies globally:

Dow
Queensland Health
Chinese Patent Office
Fuji
Mallinckrodt
UBS
Express Scripts
Daiichi Sankyo
Medtronic
Novartis

Drugs may be covered by multiple patents or regulatory protections. All trademarks and applicant names are the property of their respective owners or licensors. Although great care is taken in the proper and correct provision of this service, thinkBiotech LLC does not accept any responsibility for possible consequences of errors or omissions in the provided data. The data presented herein is for information purposes only. There is no warranty that the data contained herein is error free. thinkBiotech performs no independent verifification of facts as provided by public sources nor are attempts made to provide legal or investing advice. Any reliance on data provided herein is done solely at the discretion of the user. Users of this service are advised to seek professional advice and independent confirmation before considering acting on any of the provided information. thinkBiotech LLC reserves the right to amend, extend or withdraw any part or all of the offered service without notice.

Copyright 2002-2017 thinkBiotech LLC
ISSN: 2162-2639

Secure SSL Encrypted Heap | Mobile and Web Analytics
Privacy and Cookies
Terms & Conditions

Follow DrugPatentWatch:



Google
Twitter
Google Plus
botpot